Excimer and exciplex lamps are gas discharge spontaneous UV or VUV sources [1]. The virtues of such lamps from the standpoint of their application are high photon energy (3.5 – 10 eV), a narrow emission band, and the possibility of scaling and selecting an arbitrary geometry of the emitting surface [2]. Three different electrical generators have been designed and used to supply an exciplex DBD lamp in order to elucidate the influence of each one of these methods over the system performance; the first method consists on supplying the lamp with short bipolar voltage pulses; the second and third methods are based on semi-resonant converters were current pulses, of controlled duration and magnitude, are injected into the lamp. For each one of the generators, measurements of the lamp and supply efficiency, are performed and analyzed, at different levels of power (up to 130 W) and operating frequencies (60-90 kHz). From the experimental results, the pulsed voltage mode approach has allowed to obtain the highest lamp efficiency (7%), yet the maximum supply efficiency is offered by the resonant mode supplies. On the basis of the lamp and the supply efficiencies, the whole system performance is analyzed.
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Plasma Applications and Diagnostics
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FuenteHAL (Le Centre pour la Communication Scientifique Directe)