Cantilevers and FBAR have been used lastly as a resonator and as a sensor, especially for those that require a detection of chemical reactions at molecular levels, such as the synthesis of proteins and DNA hybridization. This article shows a comparison that helps to evaluate these devices used to detect variations on mass and to model their behavior based on the compatibility requirements needed on organic substances. Also, it’s shown the results obtained with some simulation software and the comparisons with other jobs. To make the electromechanical analysis it’s used ANSYS and for the electrical equivalent circuit it’s used SPICE.