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Recubrimientos de TiAlN sobre acero ASTM A36 por el proceso de sputtering reactivo RF

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Abstract:

TiAlN films were deposited on ASTM A36 steel by RF reactive sputtering process using a TiAl (60/40%) target. Films were sputtered at two different relative pressures, 0,05 and 0,1, keeping constant the Argon pressure. The films were deposited on samples with different pretreatments: as received material, hardened and quenched, plasma-nitrided, and with initial coatings of Ti and TiN. Film deposition was conducted at 230°C. The TiAlN films showed composition Ti0.4Al0.6N with preferred orientation (200). The best properties of hardness, corrosion resistance, and wear resistance were observed at a relative pressure of 0,1 and best adherence at a relative pressure of 0,05. The highest was 2500 HK.

Tópico:

Metal and Thin Film Mechanics

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Citations: 1
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Información de la Fuente:

FuenteRevista Facultad De Ingenieria-universidad De Antioquia
Cuartil año de publicaciónNo disponible
VolumenNo disponible
Issue37
Páginas107 - 114
pISSNNo disponible
ISSNNo disponible

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