On this work were grown and characterized thin films of zirconium oxide on seven different substrates: common glass, silicon (100) and stainless steel AISI 304, 304LS, 316L, 321 y 2205. The coatings were deposited by ultrasonic spray pyrolysis technique and the effect of some deposit variables was analyzed. Some of the variables were: substrate temperature, the flow ratio of impact and drag, and deposition time. Deposited phases identification was carried out by Xray diffraction scanning electron microscopy and atomic force microscopy. The phase analysis of steel and coating was performed by Rieltveld refinement and surface chemical analysis performed by X-ray Photoelectron Spectroscopy. The results show homogeneous films, with high reproducibility in the tetragonal crystalline structure and shows stability over time. The coatings deposited on 316L steel showed a higher orientation in the plane (101), while the other substrates show mixed orientation.