Thin films of binary system were deposited on an austenitic steel substrate by RF magnetron sputtering process. The films were obtained starting from a W – C binary target prepared by fixation of tungsten (W) portions on a graphite (C) target. Characterization of the films was carried out by Raman spectroscopy, Energy Dispersive X–ray Spectroscopy (EDX), and Atomic Force Microscopy (AFM). Into the films, it was possible to identify a nanostructure composite relating their chemical composition whit phases WC (δ) and W2C (β). The study shows how the chemical composition and the obtention of the WC (δ) and W2C (β) phases depend on the deposition parameters and composition of the targets used.