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Full-field and contact-less topography of nanometric thin films based on multiwavelength interferometry

Acceso Cerrado
ID Minciencias: ART-0000033294-31677
Ranking: ART-ART_D

Abstract:

This paper discusses a method to measure the thickness of thin layers deposited on a reflective substrate. A Michelson type interferometer with three wavelengths produces color interferences. A color sensor records the tint that is produced. The color interferences are approximated by a model based on the measurement of the laser intensities obtained with the reference mirror only. An iterative process leads to unambiguous algorithmic convergence and high accuracy thickness measurement. This method is simple, robust, compact, and single shot. The method does not need for angular scanning over the field of measurement (about 75mm<sup>2</sup>). The measurement on the surface yields a histogram of the thickness distribution and there is no requirement for any reference points (e.g. no need to make a groove or a walk on the layer). A thickness measurement performance of 50nm was demonstrated for homogenous polymer films deposited on silicon wafer. Set-up and digital image processing are discussed.

Tópico:

Surface Roughness and Optical Measurements

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Citations: 3
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Información de la Fuente:

SCImago Journal & Country Rank
FuenteProceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
Cuartil año de publicaciónNo disponible
Volumen9525
IssueNo disponible
Páginas952508 - 952508
pISSNNo disponible
ISSN0277-786X

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