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FuenteMaterials Science in Semiconductor Processing | Cuartil año de publicaciónNo disponible | Volumen161 |
IssueNo disponible | Páginas107452 - 107452 | pISSNNo disponible |
ISSN1369-8001 | Perfil OpenAlexhttps://openalex.org/S82126420 | |
| Scienti ID | 0001577395-15 | Scienti ID | 0000110400-337 | Scholar citations URL | https://scholar.google.com/scholar?cites=8851356117689248437&as_sdt=2005&sciodt=0,5&hl=en |
|---|---|---|---|---|---|
| Openalex URL | https://openalex.org/W4353061295 | Doi URL | https://doi.org/10.1016/j.mssp.2023.107452 | Scholar URL | https://scholar.google.com/scholar?hl=en&as_sdt=0%2C5&q=info%3AtSpZF35V1noJ%3Ascholar.google.com&btnG= |
| Scienti URL | https://doi.org/10.1016/j.mssp.2023.107452 | ||||
