This work presents the design and fabrication of two different vacuum chuck systems for a spincoater apparatus.One of the vacuum chuck designs considered was sealed with toric joints and the other was sealed with bearings.These vacuum chucks were adapted to a DC brushless motor which has a nonperforated shaft.The vacuum chuck with toric joints presented a superior performance when compared to the design with bearings.The best chuck design showed variations in temperature below 1 °C for spincoating speeds in the range of 100 to 4000 rpm.In all cases, the vibrations of the spin-coating apparatus were measured to be below 1 RMS.To test the performance of the spin-coater, photoresist (PR) films were spin-coated at different rotational speeds.At 3000 rpm the measured PR thickness was 0.42 ± 0.02 , giving a good match to the data reported by the PR manufacturer.