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FuenteMaterials Science in Semiconductor Processing | Cuartil año de publicaciónNo disponible | Volumen107 |
IssueNo disponible | Páginas104839 - 104839 | pISSNNo disponible |
ISSN1369-8001 | Perfil OpenAlexhttps://openalex.org/S82126420 | |
| Scienti ID | 0000343196-308 | Minciencias ID | ART-0000343196-308 | Scholar URL | https://scholar.google.com/scholar?hl=en&as_sdt=0%2C5&q=info%3Axp3gKeKh5_sJ%3Ascholar.google.com&btnG= |
|---|---|---|---|---|---|
| Scholar citations URL | https://scholar.google.com/scholar?cites=18151654815877340614&as_sdt=2005&sciodt=0,5&hl=en | Openalex URL | https://openalex.org/W2991044248 | Doi URL | https://doi.org/10.1016/j.mssp.2019.104839 |
