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FuenteMaterials Science in Semiconductor Processing | Cuartil año de publicaciónNo disponible | Volumen103 |
IssueNo disponible | Páginas104640 - 104640 | pISSNNo disponible |
ISSN1369-8001 | Perfil OpenAlexhttps://openalex.org/S82126420 | |
| Scienti ID | 0000009550-9 | Scienti ID | 0000660230-250 | Scienti ID | 0000084638-622 |
|---|---|---|---|---|---|
| Minciencias ID | ART-0000084638-622 | Scienti ID | 0001350796-15 | Scholar citations URL | https://scholar.google.com/scholar?cites=17686526586571940786&as_sdt=2005&sciodt=0,5&hl=en |
| Openalex URL | https://openalex.org/W2963093995 | Scienti URL | https://www.sciencedirect.com/science/article/pii/S1369800119307942 | Scholar URL | https://scholar.google.com/scholar?hl=en&as_sdt=0%2C5&q=info%3AsmMfJzkqc_UJ%3Ascholar.google.com&btnG= |
| Doi URL | https://doi.org/10.1016/j.mssp.2019.104640 | ||||
