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An Optical Diffuse Reflectance Model for the Characterization of a Si Wafer with an Evaporated SiO2 Layer

Acceso Abierto
ID Minciencias: ART-0000749257-63
Ranking: ART-ART_A1

Abstract:

Thin films are a type of coating that have a very wide spectrum of applications. They may be used as single layers or composed in multilayer stacks, which significantly extend their applications. One of the most commonly used material for thin films is silicon dioxide, SiO2. Although there are other tools that can be used to measure the thickness of SiO2 films, these tools are very complex and sophisticated. In this article, we propose the use of an exponential two-layer light-material interaction model, throughout its diffuse reflectance spectra, as an alternative for the measurement of the thickness of evaporated SiO2 on Si wafers. The proposed model is evaluated experimentally by means of a 980-nm-thick SiO2 layer evaporated on a Si wafer. The results show that the proposed model has a strong correlation with the thickness measurements obtained using commercial equipment.

Tópico:

Thin-Film Transistor Technologies

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Citations: 3
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Información de la Fuente:

SCImago Journal & Country Rank
FuenteSensors
Cuartil año de publicaciónNo disponible
Volumen19
Issue4
Páginas892 - 892
pISSNNo disponible
ISSNNo disponible

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