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FuenteMaterials Science in Semiconductor Processing | Cuartil año de publicaciónNo disponible | Volumen72 |
IssueNo disponible | Páginas37 - 45 | pISSNNo disponible |
ISSN1369-8001 | Perfil OpenAlexhttps://openalex.org/S82126420 | |
| Scienti ID | 0001421151-47 | Scienti URL | http://dx.doi.org/10.1016/j.mssp.2017.09.021 | Doi URL | https://doi.org/10.1016/j.mssp.2017.09.021 |
|---|---|---|---|---|---|
| Scholar URL | https://scholar.google.com/scholar?hl=en&as_sdt=0%2C5&q=info%3AaHqW0LlIx3oJ%3Ascholar.google.com&btnG= | Openalex URL | https://openalex.org/W2758167950 | Scholar citations URL | https://scholar.google.com/scholar?cites=8847119955898301032&as_sdt=2005&sciodt=0,5&hl=en |
