In this article, the fluid-structure interaction phenomena was simulated by the computational tool COMSOL ® Multiphysics, using as case of study the reciprocating motion from the integrated diaphragm of a vacuum micropump, modeling this element as a deformable structure, able to deflect itself under an applied load, and whose interaction with the fluid involves a change in the flow path. Detailing for this study the process of mechanical analysis and numerical simulation. Analyzing the performance of the micropump model relative to other prototypes offered by the current state of the art.