Abstract BiMnO 3 thin films were deposited on single‐crystal (001)‐oriented SrTiO 3 substrates by rf‐magnetron sputtering method. X‐ray diffraction was used to analyze the crystal structure of the thin films, indicating that the films were monoclinic with two dominant orientation relationships along the substrate. The first is (111) BiMnO 3 ‖ (001) SrTiO 3 ; the second is (222) BiMnO 3 ‖ (002) SrTiO 3 ; other peaks showed that the films were polycrystalline. The roughness of the films was characterized by AFM. R vs. T was measured from 390 K to 15 K using a Keithley Model 167 Programmable Electrometer. Magnetic characterization was carried out by using a quantum design ™ magnetometer for magnetization versus temperature and for hysteresis loops at different temperatures. The saturation magnetic moment of 2.8μ B per Mn ion (still fairly smaller than that of the bulk, 3.6μ B ) was observed at 5 K decreasing with increasing temperature. (© 2007 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)