A low power carbon dioxide CW laser @10.6μm has been designed and built for a clean and efficient production and treatment of high tech ceramic materials. The laser beam optical properties have been characterized from integral and differential beam profile measurements, and the power distributions, at the TEM₀₀ and TEM₁₀, modes were measured. Laser processing and treatment typical results on nanostructure ceramic materials (Yttria-Stabilized Zirconia and Silicon Carbide) are presented in this work. Laser irradiation effects were observed and studied using AFM, XPS, and FTIR techniques performed on irradiated samples and compared with non-treated probes results.