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A kalman filtering process control scheme with an application in semiconductor short run manufacturing

Acceso Cerrado
ID Minciencias: ART-0000001547-24
Ranking: ART-ART_A1

Abstract:

Abstract A quality control chart for monitoring a short run process during the start‐up phase is presented in this article. The chart is based on the Kalman filter recursive equations being applied to a stable process where the process variance is unknown prior to the start of the production run. The run length properties of this control scheme are discussed. It is shown that for the proposed scheme the run length properties are independent of the unknown process variance and that these properties are appropriate for monitoring a stable process during start‐up. An economic model for the optimal design of the control scheme is presented and illustrated with a wet etching process used in semiconductor manufacturing.

Tópico:

Advanced Statistical Process Monitoring

Citaciones:

Citations: 18
18

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Paperbuzz Score: 0
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Información de la Fuente:

SCImago Journal & Country Rank
FuenteQuality and Reliability Engineering International
Cuartil año de publicaciónNo disponible
Volumen11
Issue2
Páginas101 - 105
pISSNNo disponible
ISSN1099-1638

Enlaces e Identificadores:

Scienti ID0000001547-24Minciencias IDART-0000001547-24Openalex URLhttps://openalex.org/W2064352694
Doi URLhttps://doi.org/10.1002/qre.4680110205
Artículo de revista