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FuenteIEEE Transactions on Semiconductor Manufacturing | Cuartil año de publicaciónNo disponible | Volumen25 |
Issue4 | Páginas589 - 597 | pISSNNo disponible |
ISSN1558-2345 | Perfil OpenAlexhttps://openalex.org/S14676311 | |
| Scienti ID | 0001446779-1 | Minciencias ID | ART-0001446779-1 | Scholar URL | https://scholar.google.com/scholar?hl=en&as_sdt=0%2C5&q=info%3ASr0QIL0x4PIJ%3Ascholar.google.com&btnG= |
|---|---|---|---|---|---|
| Openalex URL | https://openalex.org/W2026251986 | Doi URL | https://doi.org/10.1109/tsm.2012.2202252 | Scholar citations URL | https://scholar.google.com/scholar?cites=17501042840318295370&as_sdt=2005&sciodt=0,5&hl=en |