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Bias voltage influence on the mechanical and tribological properties of titaniumaluminum nitride coatings produced by triode magnetron sputtering

Acceso Abierto
ID Minciencias: ART-0000018350-7
Ranking: ART-ART_B

Abstract:

TixAl1-xN coatings were grown using the triode magnetron sputtering technique with various bias voltages between -40 V and -150 V. As the bias voltage increased, an increase in the Al atomic percentage was observed, presenting a competition with Ti and producing structural changes. Moreover, the grain size and roughness were also strongly influenced by the bias voltage. It was observed that coatings with concentrations of approximately 25% Al and 75% Ti exhibited an optimum mixture of mechanical and tribological properties. The average coefÞcient of friction was low for the TiAlN coating that was grown at -40 V. Additionally, the critical load was obtained by measuring the adhesion using the scratch test.

Tópico:

Metal and Thin Film Mechanics

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Citations: 6
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Información de la Fuente:

SCImago Journal & Country Rank
FuenteMatéria (Rio de Janeiro)
Cuartil año de publicaciónNo disponible
Volumen20
Issue1
Páginas115 - 126
pISSNNo disponible
ISSNNo disponible

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