ZnO thin films were deposited on amorphous glass substrates using successive ionic layer adsorption and reaction (SILAR). The employed baths were ammonium zincate, with NH3 and NH4OH as complex agents and ZnSO4 and Zn(NO3)2 as precursor sources. The comparison between films deposited by three processes was studied by means of X-ray diffraction (XRD), optical absorption, and micro Raman. The band gap is between 3.14 and 3.30 eV. By μ-Raman spectroscopy, the principal vibration modes around 435 and 579cm-1 were determined in all the films.