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FuenteMaterials Science in Semiconductor Processing | Cuartil año de publicaciónNo disponible | Volumen16 |
Issue6 | Páginas1382 - 1387 | pISSNNo disponible |
ISSN1369-8001 | Perfil OpenAlexhttps://openalex.org/S82126420 | |
| Minciencias ID | ART-0000098060-6 | Scienti ID | 0000098060-6 | Openalex URL | https://openalex.org/W1978281187 |
|---|---|---|---|---|---|
| Doi URL | https://doi.org/10.1016/j.mssp.2013.06.011 | Scholar URL | https://scholar.google.com/scholar?hl=en&as_sdt=0%2C5&q=info%3AJc7OmthwiDQJ%3Ascholar.google.com&btnG= | Scholar citations URL | https://scholar.google.com/scholar?cites=3785399562417393189&as_sdt=2005&sciodt=0,5&hl=en |
