Abstract A technique for the characterization of microwave dielectric properties of high dielectric constant thick films at room temperature is proposed, using multilayered coplanar waveguide transmission lines with high dielectric constant thick films deposited over the lines.Besides the simplicity, the technique allows the characterization of the films under similar conditions to those in which they will operate as compact devices in multilayered configurations. Time domain analysis and experimental results for 61‐micron thick Barium Titanate films have confirmed the relative dielectric constant and loss tangent values (respectively, 100 and 0.3) predicted by the frequency domain characterization proposed. © 2010 Wiley Periodicals, Inc. Microwave Opt Technol Lett 52:2339–2344, 2010; Published online in Wiley InterScience (www.interscience.wiley.com). DOI 10.1002/mop.25440