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FuenteMaterials Science in Semiconductor Processing | Cuartil año de publicaciónNo disponible | Volumen15 |
Issue5 | Páginas492 - 498 | pISSNNo disponible |
ISSN1369-8001 | Perfil OpenAlexhttps://openalex.org/S82126420 | |
| Scienti ID | 0000675067-103 | Minciencias ID | ART-0000675067-103 | Doi URL | https://doi.org/10.1016/j.mssp.2012.03.009 |
|---|---|---|---|---|---|
| Scholar URL | https://scholar.google.com/scholar?hl=en&as_sdt=0%2C5&q=info%3AjUmEOJHR93oJ%3Ascholar.google.com&btnG= | Scholar citations URL | https://scholar.google.com/scholar?cites=8860781213523397005&as_sdt=2005&sciodt=0,5&hl=en | Openalex URL | https://openalex.org/W1973885838 |
