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Topography of nanometric thin films with three-wavelength digital interferometry

Acceso Cerrado
ID Minciencias: ART-0000033294-31678
Ranking: ART-ART_A2

Abstract:

This paper discusses a method to measure the thickness of thin layers deposited on a reflective substrate. An interferometer with three wavelengths produces color interferences. A color sensor records the tint that is produced. The color interferences are approximated by a model based on the measurement of the laser intensities obtained with the reference mirror only. An iterative process leads to unambiguous algorithmic convergence and high accuracy thickness measurement. This method is simple, robust, compact, and single shot. The method does not need angular scanning over the field of measurement (about 75 mm2). The measurement on the surface yields a histogram of the thickness distribution and there is no requirement for any reference points (e.g., no need to make a groove or a walk on the layer). A thickness measurement performance of 50 nm was demonstrated for homogeneous polymer films deposited on a silicon wafer. The setup and digital image processing are discussed.

Tópico:

Surface Roughness and Optical Measurements

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Citations: 1
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Información de la Fuente:

SCImago Journal & Country Rank
FuenteJournal of Micro/Nanolithography MEMS and MOEMS
Cuartil año de publicaciónNo disponible
Volumen14
Issue4
Páginas041309 - 041309
pISSNNo disponible
ISSN1932-5150

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