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FuenteJournal of Micro/Nanolithography MEMS and MOEMS | Cuartil año de publicaciónNo disponible | Volumen14 |
Issue4 | Páginas041309 - 041309 | pISSNNo disponible |
ISSN1932-5150 | Perfil OpenAlexhttps://openalex.org/S205064806 | |
| Scienti ID | 0000033294-31678 | Minciencias ID | ART-0000033294-31678 | Openalex URL | https://openalex.org/W1615679999 |
|---|---|---|---|---|---|
| Doi URL | https://doi.org/10.1117/1.jmm.14.4.041309 | Scholar citations URL | https://scholar.google.com/scholar?cites=1701666786975526423&as_sdt=2005&sciodt=0,5&hl=en | Scholar URL | https://scholar.google.com/scholar?hl=en&as_sdt=0%2C5&q=info%3AF67BS-2InRcJ%3Ascholar.google.com&btnG= |