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Hard coating layers of TiN on steels by D.C. sputtering at high pressures

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Abstract:

We used a d.c. sputtering method at high pressures (3–4 mbar) in an argon‐nitrogen gas mixture, to produce hard coating layers of TiN on different steels at temperatures between 300 °C and 450 °C. The composition and the profile concentration of the coated layers has been made using Energy Dispersive X‐Ray analysis, EDX, and Auger Electron Spectroscopy, AES. We have analyzed the influence of the deposition parameters on the mechanical properties. Vickers micro hardness measurement showed an increase of about 125% over D3 type steels hardness. The used method is very effective in order to improve the superficial properties of these steels.

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Metal and Thin Film Mechanics

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FuenteAIP conference proceedings
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ISSN1551-7616

Enlaces e Identificadores:

Scienti ID0000000710-424Scienti ID0000000590-13Doi URLhttps://doi.org/10.1063/1.51117
Openalex URLhttps://openalex.org/W1586139316
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