X-ray photoelectron spectroscopy
Auger electron spectroscopy
Sputter deposition
Analytical Chemistry (journal)
Materials science
Sputtering
Nitride
Electrical resistivity and conductivity
Cavity magnetron
Electron spectroscopy
Conductivity
Thin film
Chemistry
Nanotechnology
Layer (electronics)
Chemical engineering
Physical chemistry
Physics
Electrical engineering
Chromatography
Nuclear physics
Engineering
