Argon
Nanoindentation
Raman spectroscopy
Sputter deposition
Methane
Materials science
Wafer
Acetylene
Thin film
Silicon
Microelectromechanical systems
Sputtering
Chemical engineering
Analytical Chemistry (journal)
Plasma-enhanced chemical vapor deposition
Nanotechnology
Composite material
Chemistry
Optoelectronics
Optics
Organic chemistry
Physics
Engineering
