Materials science
Plasma-enhanced chemical vapor deposition
Residual stress
Silane
Chemical vapor deposition
Amorphous solid
Fourier transform infrared spectroscopy
Amorphous carbon
Silicon
Amorphous silicon
Analytical Chemistry (journal)
Carbon fibers
Thin film
Composite material
Chemical engineering
Nanotechnology
Crystalline silicon
Optoelectronics
Composite number
Organic chemistry
Chemistry
Engineering
